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Dichlorsilane SiH 2Cl2 |
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|
Dichlorsilane SiH 2Cl2 |
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Periodic Chart | Incompatibility Chart | Atmospheric Chart | Reference |
| General Characteristics | Health Hazards | Material Recommendations |
| A colorless, corrosive, liquefied and flammable gas with a penetrating odor. Forms white smoke in moist air. Forms hydrogen chloride in contact with water. |
A highly toxic material. Attacks eyes and mucous membranes. Can causes lung damage. |
Nickel and stainless steel. Highly corrosive in the presence of moisture. |
| TLV-TWA | Flammable Limits | DOT Class / Label |
| 500 ppm | 4.1 - 99% | 2.3 / Poison Gas |
| Molecular Weight | Specific Gravity | Specific Volume |
| 101.0 | 3.52 @ 77 F | 3.830 cu.ft./lb @ 70 F |
| CGA Valve Outlet | CAS Registry No. | UN Number |
| 678 | 4109-96-0 | 2189 |
| National Stock Number (NSN) Applicable to Dichlorosilane | MIL Specs/ Fed Specs MSDS for Dichlorosilane |
| Grade Part # |
Purity Minimum | Cylinder Size |
Volume Lbs. |
Pressure @ 70 F |
Comments |
| Electronic 470200 |
99.0% Min. >400 ohm-cm N-type Liquid Phase |
049 044 007 003 |
90 50 10 5 |
9 9 9 9 |
None |
| Uses: Dichlorosilane is used chiefly in the deposition of epitaxial silicon. |