Silane
SiH
4
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General Characteristics Health Hazards Material Recommendations
A colorless and extremely reactive compressed gas. Toxic, ignites spontaneously in air. Noncorrosive to most metals. Stainless steel, aluminum, iron and brass.
TLV-TWA Flammable Limits DOT Class / Label
Pyrophoric Flammable 2.1 / Flammable
Molecular Weight Specific Gravity Specific Volume
32.1 1.114 @ 70° F 12.10 cu.ft./lb @ 70° F
CGA Valve Outlet CAS Registry No. UN Number
350 7803-62-5 2203
National Stock Number (NSN) Applicable to Silane MIL Specs/ Fed Specs
MSDS for Silane


Grade
Part #
Purity Minimum Cylinder
Size
Volume
Grams
Pressure
@ 70 F
Comments
Electronic
472300
99.997% Min.
Liquid Phase
044
044
044
007
13000
5000
1200
100
1205
875
150
150

None


Uses: Silane - SiH4is a colorless gas with a repulsive odor at room temperature and atmospheric pressure. It is stable indefinitely in metal containers. Silane in the pure state is spontaneously combustible in air. Silane offers a source for high purity silicon in epitaxial and thin film deposits, and for the formation of high purity silicon oxides.

Precautions in handling and storage:

The following specific precautions should be observed in handling silane:

1) Store at positive pressures.

2) Piping and equipment should be thoroughly pressure checked above working pressure and be genuinely air-tight.

3). Do not condense (—110°C or less) silane. Serious accidents have occurred with liquid and solid silane.

4) Evacuate piping and systems and purge with inert gas before introducing silane.

5) Vent with carrier gas to outdoors — no hoods — through pipe small enough to insure no back diffusion. Stainless steel or iron pipe is preferred.

6) Use diaphragm pack-less valves with resilient seats such as Teflon.

7) Remove back plates on rotameters and pressure gauge covers.

8) Pressure regulators used with silane should have metal diaphragms to allow complete evacuation. CFC Model SGVSGS260D (Stainless Steel High Pressure Single Stage with Tied Diaphragm).

9) Be very cautious about using silane in systems with halogenated compounds. Even a trace of free halogen can be violently explosive with silane.

10) Mixtures down to 1% silane in hydrogen and / or nitrogen have been found to be spontaneously flammable when mixed with air. Note: At very high escape velocities mixtures as high as 10% may not spontaneously ignite. Venting of hydrogen - silane mixtures of any concentration should be done as if it were pure silane.

11) Ground all lines and equipment used with silane.

12) Do not store reserve stocks of silane with cylinders containing oxygen or other highly oxidizing materials.